Lecture notes on principles of plasma processing (Record no. 14637)

MARC details
000 -LEADER
Control field 00620 a2200193 4500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
Control field 111214t xxu||||| |||| 00| 0 eng d
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2002040665
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
ISBN 0306474972
100 ## - MAIN ENTRY--PERSONAL NAME
Author Chen, Francis F.
245 ## - TITLE STATEMENT
Title Lecture notes on principles of plasma processing
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Chang, Jane P.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Name of publisher Kluwer Academic / Plenum,
Date of publication 2003.
Place of publication New York:
300 ## - PHYSICAL DESCRIPTION
Pagination ix, 208p.
Other physical details ill.
Accompanying material 1CD attached.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term Plasma engineering.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term Plasma chemistry.
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term Plasma dynamics.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Item type Books
Class Mark TA2020 .C454 2003
Holdings
Source of classification or shelving scheme Not for loan Collection code Home branch Holding branch Shelving location Source of acquisition Full call number Acc. No. Date Accessioned Koha item type
Library of Congress Classification Available for loan Non Fiction Medical Medical Stack Donation TA2020 .C454 2003 BK0006496 02/12/2011 Books
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