TY  - GEN
AU  - Chen, Francis F.
AU  - Chang, Jane P.
TI  - Lecture notes on principles of plasma processing
SN  - 0306474972
PY  - 2003///
CY  - New York
PB  - Kluwer Academic / Plenum
KW  - Plasma engineering.
KW  - Plasma chemistry
KW  - Plasma dynamics
ER  -