TY  - GEN
AU  - Bhattacharya, Dilip Kumar
AU  - Kaushik, Brajesh  Kumar
TI  - Microelectromechanical systems (MEMS)
SN  - 9788131525883
PY  - 2015///
CY  - Delhi
PB  - Cengage Learning India
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Materials
ER  -