| 000 | 00620 a2200193 4500 | ||
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| 008 | 111214t xxu||||| |||| 00| 0 eng d | ||
| 010 | _a2002040665 | ||
| 020 | _a0306474972 | ||
| 090 |
_c14637 _d14637 |
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| 100 |
_aChen, Francis F. _92267 |
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| 245 | _aLecture notes on principles of plasma processing | ||
| 700 |
_aChang, Jane P. _92271 |
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| 260 |
_bKluwer Academic / Plenum, _c2003. _aNew York: |
||
| 300 |
_aix, 208p. _bill. _c1CD attached. |
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| 650 |
_aPlasma engineering. _92268 |
||
| 650 |
_aPlasma chemistry. _92269 |
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| 650 |
_aPlasma dynamics. _92270 |
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| 942 |
_cBK _hTA2020 .C454 2003 |
||
| 999 |
_c14637 _d14637 |
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